The SPG series of sapphire diaphragm gauges has a singlecrystal sapphire pressure sensing element that offers excellent corrosion resistance, ability to withstand high temperatures, and excellent mechanical properties. In addition, it detects static capacitance to achieve excellent measurement repeatability even in hightemperature measurement environments. These self-heating diaphragm vacuum gauges utilize advanced signal processing technology to achieve temperature characteristics and linearity with minimal measurement error. Their sapphire sensor, which is formed with micromachining technology, makes the compact size and light weight possible.
